- "Nanotechnology" (x)
- Search results
-
-
Title
-
Maskless Lithography Using Silicon Oxide Etch-Stop Layer Induced by Megahertz Repetition Femtosecond Laser Pulses
-
Date
-
2011
-
Author(s)
-
Kiani, Amirkianoosh (Author), Venkatakrishnan, Krishnan (Author), Tan, Bo (Author), Venkataramanan, Venkat (Author)
-
Subject(s)
-
Lithography, Femtosecond lasers, Silicon oxide, Nanotechnology